Thermal Mass Flow Meters

Thermal Mass Flow Meters generally use combinations of heated elements and temperature sensors to measure the difference between static and flowing heat transfer to a fluid and infer its flow with a knowledge of the fluid's specific heat and density. The fluid temperature is also measured and compensated for. If the density and specific heat characteristics of the fluid are constant, the meter can provide a direct mass flow readout, and does not need any additional pressure temperature compensation over their specified range.Technological progress has allowed the manufacture of thermal mass flow meters on a microscopic scale as MEMS sensors; these flow devices can be used to measure flow rates in the range of nanolitres or microlitres per minute.

Thermal mass flow meter also called thermal dispersion flow meter technology is used for compressed air, nitrogen, helium, argon, oxygen, and natural gas. In fact, most gases can be measured as long as they are fairly clean and non-corrosive. For more aggressive gases, the meter may be made out of special alloys , and pre-drying the gas also helps to minimize corrosion. Today, thermal mass flow meters are used to measure the flow of gases in a growing range of applications, such as chemical reactions or thermal transfer applications that are difficult for other flow metering technologies. This is because thermal mass flow meters monitor variations in one or more of the thermal characteristics of gaseous media to define the mass flow rate.

There are two types of thermal flow meters in industry. Industrial thermal mass flow meters, also known as thermal dispersion or immersible mass flow meters comprise a family of instruments for the measurement of the total mass flow rate of a fluid, primarily gases, flowing through closed conduits. A second type is the capillary-tube type of thermal mass flow meter. Many mass flow controllers (MFC) which combine a mass flow meter, electronics and a valve are based on this design. Both types measure fluid mass flow rate by means of the heat convected from a heated surface to the flowing fluid. In the case of the thermal dispersion, or immersible, type of flow meter, the heat is transferred to the boundary layer of the fluid flowing over the heated surface. In the case of the capillary-tube type, the heat is transferred to the bulk of the fluid flowing through a small heated capillary tube. The principles of operation of the two types are both thermal in nature, but are so substantially different that two separate standards are required. Additionally, their applications are much different. Thermal dispersion flow meters are commonly used for general industrial gas flow applications in pipes and ducts, whereas capillary types are primarily used for smaller flows of clean gases or liquids in tubes. This type is most widely used for thermal mass flow meters in industry. Nevertheless, the capillary type is not the subject of this discussion.